The model is VCAH0070-0149-00A voice coil motor with built-in motion shaft and precision linear bearing. The movable shaft is made of high quality material with light weight, high rigidity and wear resistance. It is characterized by light weight, small volume, short response time, high frequency, high precision, high acceleration, long life, etc. . Presents a fully enclosed shaft voice coil motor with a fully protected, export-type voice coil motor that provides superior performance and is completely enclosed at a low noise level. Made of aluminum alloy wear-free, full house voice coil actuator to provide superior durability and life.

Linear built-in shaft Voice Coil Motor (VCM) has a wide range of applications in the semiconductor industry, mainly in the following areas:

Lithography Systems:

Lithography is a key piece of equipment in the semiconductor manufacturing process, used to transfer circuit patterns onto silicon wafers. The lithography process requires extreme precision and fast response. Linear built-in shaft voice coil motors are ideally suited for use in alignment and scanning systems for lithography machines due to their high acceleration, precise position control and wear-free motion.
Wafer Handling:

During wafer handling, wafers need to be moved precisely and quickly. Voice coil motors provide frictionless linear motion to ensure highly accurate positioning of wafers during handling. This is critical for transferring, positioning and loading wafers to improve productivity and yield.
Probe Stations:

Probe Stations are used to accurately place probes at specific locations on a wafer to test its electrical characteristics during semiconductor testing. The high accuracy and responsiveness of voice coil motors make them ideally suited to the tiny movements and precise positioning needs of probe stations.
Packaging Equipment:

In the semiconductor packaging process, chips need to be precisely mounted and connected. Voice coil motors can play a key role in the precise control and fast response of the mounting head, thus increasing the speed and accuracy of the packaging process.
Auto-alignment Systems:

The alignment process in semiconductor manufacturing requires a high degree of precision to ensure that the circuit patterns of each layer are correctly stacked. The high-precision positioning characteristics of voice coil motors make them ideal for use in auto-alignment systems, enabling nanometer-level alignment accuracy.

Technical Parameters:

Applications:

Technical indicators & specifications can be customized

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