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High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

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High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

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Brand Name :	SUPT
Model Number :	A Series
Certification :	3C, CE, ISO9001
Price :	$150.00/pieces >=1 pieces
Payment Terms :	T/T
Supply Ability :	To be negotiated
Delivery Time :	1-5pcs ,5 days . >20pcs ,To be negotiated

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High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

Product Description:

The linear motor's armature consists solely of coils without magnets, eliminating magnetic attraction between moving and stationary parts. This design prevents cogging effects, ensuring smooth operation. Its lightweight construction enables high-speed and high-acceleration performance. The thrust characteristics are smooth, achieving high precision when paired with linear encoders. The stroke can be extended arbitrarily, operating silently and maintenance-free. Features imported epoxy resin vacuum-filled at high temperature and pressure, along with highly flexible power cables. Widely applied in semiconductor manufacturing equipment, precision testing equipment for the flat-panel display industry, laser cutting/marking machines, and machine vision inspection systems. Modular design allows for custom machining.
Linear motor technology is the core driver advancing semiconductor manufacturing equipment, serving as the essential direct drive for achieving precise wafer positioning and high-speed motion.
Leveraging its high precision, speed, acceleration, and smooth motion characteristics, the linear motor enables precise wafer extraction from cassettes within wafer transfer systems, high-accuracy placement onto processing stations, and rapid return of wafers to cassettes post-processing.
Within precision positioning platforms, linear motors support and precisely position wafers. Wafer carriers must perform nanometer-level stepping and scanning movements within the XY plane to complete exposure. In microscopes and defect detection equipment, wafers must also be accurately moved beneath inspection probes.

Product Parameters:

Linear motor performance parameters
A Series--MLCA(Dynamic) MLFA(Stator)
Model/Par		MLCA-0020-075-00	MLCA-0040-135-00	MLCA-0080-255-00
Peak force(Fp)	N	60	120	240
Peak current(lp)	Amps	4.8	4.2	4.2
Continuous force(Fc)	N	20	40	80
Continuous current(lc)	Amps	1.6	1.4	1.4
Actuator constants(DC motor conversion/3p)(Ka)	N/W	5.65	7.9	11.2
Constant Thrust(L-L)(Kf)	N/Amps	15.3	30.4	60.3
Back EMF constant(L-L)(Kb)	V/m/sec	8.8	17.6	34.8
Electrical constant(Te)	ms	0.3	0.3	0.3
Resistance(L-L)(R)	@25℃Ω	4.8	9.4	19.2
Inductance(L-L)(l)	mh	1.51	3	6
Heat transfer coefficient(Rth)	℃/W	*3.9	*1.9	**1.3
Coil maximum temperature(Tmax)	℃	120	120	120
Magnet Pole pitch(2T)	mm	30	30	30
Mover weight	Kg	0.24	0.42	0.82

High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

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High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

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Our Company

Suzhou Unite Precision Technology Co,Ltd.(SUPT Motion)is an engineering and manufacturing company dedicated to providing Voice Coil Actuator linear motor and linear motor platform,SUPT Motion is to provide both a standard distribution product and also madium and high volume custom OEM solutions.The primary product is voice coil based linear and rotary actuator and brushless permantent magnet type linear motor.

The company has strong R&D capability perfect after sale service system.SUPT Motion is able to according to customer specific requirements design and produce voice coil motor linear motor and all kinds of linear motion platform.With many years of experience,our international engineering and manufacturing staff is able to provide the most advanced technology and best quality product for the Asia,North America,Europe and the world varios areas of voice coil motor and linear motor customers and dealers.

The company is able to provide cost effective solution to you large OEM production requirement for you by being based in the manufacturing centers of Suzhou,we will continue to improve in technology strive for perfection in the quality.Adhering to the tenet of SUPT Motion Hight quality is our pursult,Customer satisfaction is our commitment.With our strict quality deparment and production deparment ensure that our high quality and inexpensive products motor more cost-effective to serve customers make it has strong competitiveness.

Linear Motors Compared to Traditional Rotating Motors:

Characteristics	Linear Motor	Traditional Transmission Methods (Screw/Belt)
High Precision	Direct drive with no intermediate transmission components eliminates backlash and backlash error, enabling nanometer level positioning accuracy.	Backlash, elastic deformation, and friction exist, limiting precision typically to the micrometer level.
High Speed and Acceleration	Reaches speeds of several meters per second and accelerations exceeding 10G, significantly boosting equipment throughput.	Limited by screw rotational,speed and inertia, resulting in lower speed and acceleration.
High Smoothness	Smooth motion with non-contact transmission and minimal vibration. Critical for vibration-sensitive processes like lithography.	Contact friction within the transmission chain can generate vibration and noise.
High Cleanliness	Lubrication-free operation eliminates grease or wear particles, meeting the ultra- high cleanliness requirements of semiconductor manufacturing.	Lubrication is required, posing a contamination risk.
High Reliability and Long Service Life	Primary and moving parts (magnetic track and coil) have no mechanical contact, resulting in minimal wear and extended lifespan.	Multiple mechanical contact points are subject to wear, requiring regular maintenance.
Vacuum Compatibility	Easily designed for vacuum- compatible models, making it ideal for vacuum process equipment.	Lubrication and heat dissipation pose significant challenges in vacuum environments.

High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

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